Institution
State Key Laboratory of Transducer Technology
Recent research
- Engineering & Technology
Direct Nanocrystal Patterning on Suspended MEMS Microheaters for Dual‐Temperature Gas Sensing
ABSTRACT Efficient integration of metal oxide nanocrystals with microelectromechanical systems (MEMS) microheaters is essential for developing compact gas‐sensing platforms, yet conventional deposition and patterning approaches often suffer from limited pattern fidelity and poor...
- Physics & SpaceOpen access
In vivo magnetic recording of neuronal action potentials using a differential TMR magnetrode
Abstract Neuronal magnetic signal recording intrinsically provides vector information and tissue transparency, offering a potential route to overcome the spatial resolution limitations of conventional electrophysiological recordings. However, in situ detection of neuronal magneti...
- Materials & Energy
Ultralow‐Dose Direct Photopatterning of Metal–Organic Frameworks for Scalable Device Integration
ABSTRACT The integration of metal–organic frameworks (MOFs) into microelectronic and optoelectronic devices requires patterning strategies that combine high sensitivity, structural preservation, and compatibility with scalable fabrication. Direct optical patterning offers a photo...