International Medical Equipment Collaborative

Vertical Compressive Stress in Fab-Integrated WS2 FETs: An In Situ Electrical and Nanoindentation-Based Study

Abstract Two-dimensional (2D) semiconductors are sensitive to mechanical stress due to their atomic thickness, weak van der Waals interfaces, and ultra-high sensitivity to the surrounding dielectric environment. While the effects of in-plane strain in transition-metal dichalcogen...