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Institut interdisciplinaire d'innovation technologique
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- Engineering & TechnologyOpen access
Reprogrammable MEMS-based fabry–perot pixel photomask
Our pioneering reprogrammable photomask based on microelectromechanical systems offers a pathway toward adaptive lithography that remains compatible with conventional stepper systems. In this work, we demonstrate for the first time optical patterning using a MEMS-based Fabry–Pero...