Center for Nanophase Materials Sciences

Correlating biaxial stress to metastable phases in Hf0.5Zr0.5O2 on substrates with different coefficients of thermal expansion

The effects of biaxial stress in hafnium zirconium oxide (HZO) thin films on the phase constitution and dielectric response are studied through the preparation of HZO films on substrates with coefficients of thermal expansion (CTE) ranging from 0.52 to 12.97 × 10−6 K−1. X-ray dif...

Epitaxially Integrated Electro‐Optic KNbO 3 Thin Films on Silicon

ABSTRACT The absence of a native electro‐optic effect in silicon remains a fundamental limitation for integrated photonics, motivating the integration of ferroelectric oxides as active materials. Here, we report the first epitaxial integration of KNbO 3 thin films on silicon, est...