Serge Ecoffey

Crystalline/amorphous silicon and silica Bragg reflectors for gravitational wave detectors

Coating thermal noise is a major source of noise in gravitational wave detection. In order to reduce this noise, we investigate the use of silicon-on-insulator (SOI) wafers as Bragg reflectors. First, we show different architectures, such as multi-SOI as top and bottom layers, in...

Reprogrammable MEMS-based fabry–perot pixel photomask

Our pioneering reprogrammable photomask based on microelectromechanical systems offers a pathway toward adaptive lithography that remains compatible with conventional stepper systems. In this work, we demonstrate for the first time optical patterning using a MEMS-based Fabry–Pero...