Materials & Energyarticle2026-09-01

Comparison of different Zr deposition techniques on CNT thin films

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Abstract

In recent years, CNT pellicles have been investigated as suitable materials for filters for high-energy astrophysics missions, and more recently specifically for EUV missions,where Zr is a relevant material due to its transmittance in this band. In this work, we present the comparison of two different types of zirconium depositions on CNT pellicles, and manage to obtain a complete filter with performances compatible with the typical requirements for EUV missions.

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View paper (DOI)Open access versionOpenAlexAaltodoc (Aalto University)Published 2026-09-01

Authors: F. Fiorentino, M. Todaro, U. Lo Cicero, L. Sciortino, E. Alaimo, F. D'Anca, G. Di Cicca, S. Varisco, A. Gulizzi, C. Saitta, P. T. Torma, B. Haq, H. Lipsanen, M. Barbera

Institutions: National Institute for Astrophysics