Tokyo Denki University

Molecular Flux Density Distribution at the Pump Flange of a Test Dome for Measuring the Speed of a High Vacuum Pump

A numerical analysis has been obtained on the distribution of the molecular flux density qo(r) at the pump aperture of a test dome for measuring the speed of a high vacuum pump. The caluculation was carried out based on solving Clausing's integral equation by using iterative appr...