Office Régional de Mise en Valeur Agricole de Ouarzazate

A 3D meshless electromechanical model incorporating electrode inertia for accurate prediction of resonance characteristics in disk-type MEMS resonators

In this study, wave propagation in disk-type piezoelectric resonators is investigated by extending the polynomial modeling approach to incorporate electrode inertia. For sufficiently thin metallic electrodes, their elastic stiffness is neglected and only their mass contribution i...