National Microelectronics Institute

Detection of Legionella Bacteria Using a Silicon‐Based Photonic Microring Resonator Biosensor Enhanced by Dielectrophoresis

Silicon-based photonic biosensors, such as microring resonators and Mach-Zehnder interferometers, offer label-free detection, high sensitivity, and full compatibility with semiconductor fabrication processes. Yet, the detection of living bacteria remains difficult due to the limi...