Institution
Micron (United States)
UScompany
Recent research
- Open access
Copper (Cu) thin films are critical interconnect materials in advanced semiconductor interconnect and packaging applications, where mechanical reliability under loading conditions relevant to semiconductor manufacturing and packaging becomes increasingly important with continued...
- Engineering & Technology
Reliable hydrogen monitoring requires sensors that combine high sensitivity, wide dynamic range, and resistance to environmental interference. Here, we report a monolithically integrated dual-Fabry-Pérot interferometer (dual-FPI) fiber-optic hydrogen sensor that couples twin Vern...