Institution
Leibniz Institute for Solid State and Materials Research
DEfacility
Recent research
- Materials & EnergyOpen access
Atomically thin amorphous carbon with an ultralow dielectric constant
Two-dimensional (2D) materials could replace conventional electronic components. Key advances have already been made in applying 2D materials to integrated circuits, but a robust, atomically thin ultralow-k dielectric remains crucial for further circuit scaling. Minimizing parasi...
- Engineering & TechnologyOpen access
Abstract Multilayer thin film structuring offers a versatile strategy to tailor nanostructures through interface engineering. Atomic layer deposition (ALD) provides precise control of composition and structure via supercycle approaches that enable the multiple metal species intro...