FBK Center for Sensors & Devices

Silicon Carbide Thin Films for MEMS: Correlating Vapor-Phase Deposition Parameters with Material Properties and Device Performance

Silicon carbide (SiC) thin films have emerged as a key material platform for micro-electromechanical systems (MEMS) designed to operate under extreme thermal, chemical, and mechanical conditions. While significant research has focused on individual SiC deposition techniques and m...