DEVCOM Army Research Laboratory

Titanium Oxynitrideby TiO2 Nitridation:A Comparative Study of Film, Nanoparticle, and Metasurface NanostructureProperties

Abstract Titanium oxynitride (TiOxNy) is a unique plasmonic material bridging dielectric TiO2 and metallic TiN. In this study, the properties of TiOxNy films, film-derived metasurfaces, and colloidal nanoparticles, all synthesized by the temperature-controlled ammonia nitridation...