Zhichun Yuan

Controlling the laser-induced textures for high-quality micro-grinding of monocrystalline silicon

The high-quality and low-damage processing of hard, brittle and difficult-to-cut materials is a well-recognized technical challenge. Herein, a hybrid machining method, laser-induced texturing assisted micro-grinding (LIT-MG), is introduced to process monocrystalline silicon (Mono...