Zhenyuan Tang

Direct Nanocrystal Patterning on Suspended MEMS Microheaters for Dual‐Temperature Gas Sensing

ABSTRACT Efficient integration of metal oxide nanocrystals with microelectromechanical systems (MEMS) microheaters is essential for developing compact gas‐sensing platforms, yet conventional deposition and patterning approaches often suffer from limited pattern fidelity and poor...

Ultralow‐Dose Direct Photopatterning of Metal–Organic Frameworks for Scalable Device Integration

ABSTRACT The integration of metal–organic frameworks (MOFs) into microelectronic and optoelectronic devices requires patterning strategies that combine high sensitivity, structural preservation, and compatibility with scalable fabrication. Direct optical patterning offers a photo...