Author
Yusnizam Yusuf
Recent research
- Physics & SpaceOpen access
Optimization of TMAl preflow for low temperature grown AlN for AlGaN UVC LED heterostructure
High material quality aluminium nitride (AlN) layers are typically achievable at high growth temperatures of above 1200 °C. However, this growth method requires a specialized heater that is not available in most standard reactors. The present study demonstrates that comparable ma...