Y. Ochiai

Dynamic Bending Stress Sensing Using NV Centers in a Single-Crystal Diamond MEMS Cantilever

In this study, a single-crystal diamond (SCD) MEMS cantilever was fabricated using a buried graphite sacrificial-layer process. A region containing nitrogen-vacancy (NV) centers formed near the ion-implantation-induced defective layer was directly utilized as the stress-sensing r...