Wei Guo

The Influence Law and Etching Verification of Sub-Wavelength Longitudinal Field Generation

The generation of sub-diffraction-limit focal spots is essential for nanoscale manufacturing, and tight focusing of radially polarized beams provides a promising route to achieve this goal through the longitudinal field. This work proposes an annular-modulation-enhanced focusing...

TiN buffer-assisted low-temperature epitaxy of 4-inch AlScN films

Abstract Wurtzite AlScN films have emerged as promising ferroelectric layers for next-generation memory and piezoelectric devices due to their high remanent polarization, excellent thermal stability (up to 1 100 °C), scalability to nanometer thickness, and back-end-of-line comple...