Author
Umut Kerimzade
Recent research
- Engineering & TechnologyOpen access
Scalable low-thermal-budget fabrication of suspended silicon nanowire devices
Silicon nanowires (Si NWs) are versatile one-dimensional building blocks for gas and biochemical sensors, MEMS/NEMS physical transduction platforms, and integrated electronic devices because of their high surface-to-volume ratios and compatibility with semiconductor processing. A...