Thomas E. Beechem

Correlating biaxial stress to metastable phases in Hf0.5Zr0.5O2 on substrates with different coefficients of thermal expansion

The effects of biaxial stress in hafnium zirconium oxide (HZO) thin films on the phase constitution and dielectric response are studied through the preparation of HZO films on substrates with coefficients of thermal expansion (CTE) ranging from 0.52 to 12.97 × 10−6 K−1. X-ray dif...

Experimental Evidence for the Impact of Copper Microstructure on Residual Stress of Through Silicon Via

ABSTRACT Three‐dimensional integrated circuits (3DICs) with Cu through silicon vias (TSVs) offer improved system performance beyond front‐end‐of‐line scaling. However, the residual thermal stress imparted by TSVs on the surrounding silicon raises reliability concerns. This stress...