Tanguy Terlier

Direct Measurements and Analysis of Catalyst Diffusion and Reaction Fronts in Chemically Amplified Resists

Abstract The propagation of both catalyst diffusion and reaction fronts in a polymeric chemically amplified resist (CAR) is evaluated by time-of-flight secondary ion mass spectrometry (TOF-SIMS) depth profiling, and is compared with the propagation of catalyst diffusion fronts in...