Saidjafarzoda Ilhom

Stability of sub-10 nm atomic layer-deposited alumina thin films on gold electrode surfaces in aqueous electrolytes

Atomic layer-deposited (ALD) alumina (Al2O3) thin films are widely employed in sensor and device fabrication as an insulating and protective layer. However, definitive studies on the aqueous stability of sub-10 nm ALD films remain limited, which poses a challenge for evaluating t...