Qianbin Luo

High-Endurance, Low-Loss Sb2Se3 Optical Switches on Silicon Nitride Using Transparent Conductive Heaters

Abstract We report an electrically actuated, low-loss nonvolatile optical switch based on the phase-change material (PCM) Sb2Se3 integrated on a silicon nitride (Si3N4) platform. The device is fabricated using an 8-in. Wafer-scale process flow, demonstrating the feasibility of sc...