Philipp Brüner

Enhanced Growthin Sb2Te3/SnSe2 Multilayered AtomicLayer Deposition: Nucleation and NanostructureModification

Abstract Multilayer thin film structuring offers a versatile strategy to tailor nanostructures through interface engineering. Atomic layer deposition (ALD) provides precise control of composition and structure via supercycle approaches that enable the multiple metal species intro...