Miklós Kellermayer

Inscription of Quasi-Sinusoidal Surface Relief Optical Gratings in ZEONOR™ Cyclic Olefin Polymer by a 10.5 MeV N4+ Ion Microbeam at Low Implanted Fluences

Direct writing of microstructures in ZEONOR™ cyclic olefin polymer, using a high-energy medium-mass ion microbeam, was proposed and demonstrated. Microbeams of 10.5 MeV N4+ ions were used. The implanted fluences were between 2.5·1012 and 2.0·1013 ion/cm2. The microstructures were...