Megan K. Lenox

Correlating biaxial stress to metastable phases in Hf0.5Zr0.5O2 on substrates with different coefficients of thermal expansion

The effects of biaxial stress in hafnium zirconium oxide (HZO) thin films on the phase constitution and dielectric response are studied through the preparation of HZO films on substrates with coefficients of thermal expansion (CTE) ranging from 0.52 to 12.97 × 10−6 K−1. X-ray dif...