Markus Andreas Schubert

Rapid Lab‐Based In Situ Monitoring of Germanium Multiple Quantum Wells Interdiffusion

ABSTRACT The Silicon–Germanium (Si‐Ge) interdiffusion and its impact on the structural and optical properties of Ge/Si 0 .₁₈Ge 0 .₈ 2 multiple quantum wells (MQW) grown on Si by industry‐standard chemical vapor deposition are investigated. The structures, consisting of 186 period...