Libing Zhou

Femtosecond laser modification of LPCVD-SiN photonic devices: microstructural evolution and post-fabrication trimming

Femtosecond laser processing provides a localized and contactless approach for permanent post-fabrication trimming of integrated photonic devices. Here, we investigate dose-dependent microstructural evolution in low-pressure chemical vapor deposition silicon nitride (LPCVD-SiN) a...