Jürgen Lisenfeld

Substrate insulated Josephson junctions for superconducting quantum circuits

We have developed a fabrication technique for Josephson junctions that employs a three-dimensional patterned, low-loss substrate instead of commonly used organic resists. The technique enables the fabrication of high-quality trilayer junctions from a wide range of geometries and...

Substrate insulated Josephson junctions for superconducting quantum circuits

We have developed a fabrication technique for Josephson junctions that employs a three-dimensional patterned, low-loss substrate instead of commonly used organic resists. The technique enables the fabrication of high-quality trilayer junctions from a wide range of geometries and...