Isidoro Ruiz‐García

Impact of Rapid Thermal Annealing on the Structural and Piezoelectric Properties of AlN Thin Films

ABSTRACT Aluminum nitride (AlN) is a biocompatible piezoelectric material with energy harvesting properties. This study examines the effects of post‐deposition rapid thermal annealing (RTA) on AlN thin films used in microelectromechanical systems (MEMS) resonators. RTA is perform...