Hohyun Keum

Dry Mask Transfer Lithography for High-Resolution Patterning of Nanomaterials and Molecular Interfaces on Arbitrary Substrates

This study introduces dry mask transfer lithography as a versatile microfabrication strategy that integrates the patterning resolution of photolithography with the substrate adaptability of soft lithography. In this method, a photoresist mask is first patterned on an elastomeric...