Guosong Zeng

Taming the boundary effect: Femtosecond laser slicing of 4H-SiC enabled by side scribing for improved processability

The 4H polytype of silicon carbide (4H-SiC) has excellent properties such as high electron mobility and high saturation electron velocity; it has therefore become an important material for high-power and high-frequency devices. In the slicing step of wafer fabrication, however, c...