Author
Felix Cahyadi
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Recent research
- Materials & EnergyOpen access
Stoichiometric Epitaxial Strontium Titanate Thin Films on Silicon by High-Temperature Sr Segregation
Abstract Thin-film strontium titanate (SrTiO3, STO) layers grown on silicon require accurate stoichiometry and single-crystalline order to exploit their functional properties optimally. Oxide molecular beam epitaxy can provide an epitaxial interface, but suffers from source oxida...