Daria D. Blach

Effect of Substrate Miscut on the Epitaxial Growth of MoS2 on Sapphire

Abstract The combined effects of substrate miscut angle and growth temperature on the epitaxial growth and properties of MoS2 monolayers synthesized by metalorganic chemical vapor deposition (MOCVD) on c-plane sapphire substrates were investigated. Increasing the miscut angle tow...