Chuangxing Wu

Direct Nanocrystal Patterning on Suspended MEMS Microheaters for Dual‐Temperature Gas Sensing

ABSTRACT Efficient integration of metal oxide nanocrystals with microelectromechanical systems (MEMS) microheaters is essential for developing compact gas‐sensing platforms, yet conventional deposition and patterning approaches often suffer from limited pattern fidelity and poor...