Carlos García Núñez

Impact of Rapid Thermal Annealing on the Structural and Piezoelectric Properties of AlN Thin Films

ABSTRACT Aluminum nitride (AlN) is a biocompatible piezoelectric material with energy harvesting properties. This study examines the effects of post‐deposition rapid thermal annealing (RTA) on AlN thin films used in microelectromechanical systems (MEMS) resonators. RTA is perform...

Uncooled mid-infrared photovoltaic detector based on Pb1−xCdxSe thin films for use in non-dispersive infrared methane gas sensors

Abstract This work is focussed on sputtered lead cadmium selenide (Pb 1−x Cd x Se) thin films as the active material within high-speed room temperature mid-infrared photovoltaic (PV) detectors for use in non-dispersive infrared gas sensors. Variation of the Cd content provides a...