Atsushi SEKIGUCHI

Fundamentals of Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) and Safety Management of Chemical SubstancesPart 5 : Atomic Layer Deposition (ALD) Methods, Digital CVD Methods

Atomic layer deposition (ALD) methods are attracting attention because these can achieve surface reactions by chemically reacting only with raw material molecules adsorbed to solid surfaces. Two highly chemically reactive raw material gases are injected alternately, and a vacuum...